mi·cro·ma·chine 
(mīkrō-mə-shēn′)
(mīkrō-mə-shēn′)n.
A machine or mechanism with parts smaller than a millimeter, as one fabricated using MEMS technology.
tr.v. mi·cro·ma·chined, mi·cro·ma·chin·ing, mi·cro·ma·chines
To machine or manufacture (MEMS components, microchips, or other parts) on the scale of less than one millimeter with a high degree of precision.