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microfabrication
microfabrication n.
Brit. 
/ˌmʌɪkrə(ʊ)fabrᵻˈkeɪʃn/
, /ˌmʌɪkrə(ʊ)fabrᵻˈkeɪʃn/U.S. /ˌmaɪkroʊˌfæbrəˈkeɪʃ(ə)n/
the manufacture of very small objects, esp. microchips or micromachines./ˌmaɪkroʊˌfæbrəˈkeɪʃ(ə)n/ΚΠ
1970 Science 20 Feb. 1179 (advt.) The LPM system is a proven tool not only for precision microfabrication but also for the balancing of small gyros [etc.].
1997 New Scientist 29 Nov. 70/2 (advt.) The post..involves silicon device fabrication in the microfabrication facility cleanroom.
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