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单词 sputter ion pump
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sputter ion pump
sputter ion pump n. [perhaps < sputter v.] Physics a pump in which the gas is absorbed by a getter that is deposited by sputtering it from a cathode.
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the world > matter > physics > atomic physics > ion > [noun] > subjection to stream of particles > pump employed in
sputter ion pump1962
1962 Sci. Amer. Mar. 82/1 (caption) Sputter ion pump works by ionizing gas molecules and removing them from the chamber..to be evacuated.
1980 J. F. O'Hanlon User's Guide Vacuum Technol. ix. 221 The sputter ion pump has the advantage of freedom from hydrocarbon contamination and ease of fault protecting but does suffer from the reemission of previously pumped gases.
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