micro-electro-mechanical system

micro-electro-mechanical system

[¦mī·krōi‚lek·trə·mə′kan·ə·kəl ‚sis·təm] (engineering) A system in which micromechanisms are coupled with microelectronics, most commonly fabricated as microsensors or microactuators. Abbreviated MEMS. Also known as microsystem.