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单词
surface micromachining
释义
surface micromachining
surface micromachining
[
¦sər·fəs ‚mī·krə·mə′shēn·iŋ
]
(engineering)
A set of processes based upon deposition, patterning, and selective etching of thin films to form a free-standing microsensor on the surface of a silicon wafer.
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更新时间:2025/3/11 21:03:50