英语词汇“plasma etching”的英英意思、用法、释义、翻译、读音、例句、短语、词组-英语词典

单词	plasma etching
释义	plasma etching plasma etching [′plaz·mə ′ech·iŋ] (electronics) A method of forming integrated-circuit patterns on a surface, in which charged species in a plasma formed above a masked surface are directed to impact the nonmasked regions of the surface and knock out substrate atoms. Also known as dry plasma etching.
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