英语词汇“dry plasma etching”的英英意思、用法、释义、翻译、读音、例句、短语、词组-英语词典

单词	dry plasma etching
释义	dry plasma etching dry plasma etching [¦drī ′plaz·mə] (electronics) plasma etching dry plasma etching A method for inscribing a pattern on a wafer by shooting hot ions through a mask to evaporate the silicon dioxide insulation layer. Dry plasma etching replaces the wet processing method that uses film and acid for developing the pattern.
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