chlo·ro·silane \| ̷ ̷ ̷ ̷+\noun (-s) Etymology:chlor- + silane 1.: a gas SiH3Cl derived from monosilane — called also monochlorosilane 2.: a chlorine derivative of a silane; especially: a derivative [as dimethyl-dichloro-silane (CH3)2SiCl2] of an organic silane used in making silicones — called also organochlorosilane